X-ray and electron nondestructive spectroscopic methods for thin films and interfaces study. Application to SrTiO3 based heterostuctures

We are focusing on the developed by us the mathematical analysis methods of the data obtained by three independent spectroscopic techniques and their application to study of atomic and chemical composition profiles across the air-exposed systems SrTiOx/B/Si with interfacial layers (B: SiO2, Si3N4 and HfO2) grown by the atomic layer deposition technique. It was established that the material of the interlayer influences strongly the crystallinity of the SrTiO3 film. Only the Si3N4 interlayer supports the Sr surface enrichment of the film in atmosphere. The HfO2 interlayer promotes the violation of the crystalline structure creating numerous defects. The SrCO3 content depends strongly on the crystallinity of the film.